Mingxi, Zong Hua, Shi Qiuping, et al. Influence of Oriented Deposition on the Thin Film Shape and Magnetic Property of Nd2Fe14B Alloy Fu[J]. Special Casting & Nonferrous Alloys, 2006,(1):7-9.
Mingxi, Zong Hua, Shi Qiuping, et al. Influence of Oriented Deposition on the Thin Film Shape and Magnetic Property of Nd2Fe14B Alloy Fu[J]. Special Casting & Nonferrous Alloys, 2006,(1):7-9.DOI：
定向沉积法对Nd2Fe14B薄膜形态和磁性能的影响
摘要
采用直流励磁磁控溅射法制备Nd2Fe14B稀土永磁薄膜。通过对衬底预热
在溅射过程中持续动态加热并保温10min
实现定向沉积。主要考虑了该方法对薄膜磁性能的影响。结果表明薄膜取向度良好
有明显柱状生长迹象。薄膜矫顽力大大提高
H⊥/H∥比值改善。在预热温度200℃逐渐加热到500℃并保温10min时
薄膜磁性能最佳。
Abstract
Nd2Fe14B alloy thin film is prepared by means of direct current magnetization magnetron sputtering
in which substrate is preheated and continuous dynamic heating is conducted during sputtering. The effects of the method on magnetic property of the thin film are investigated. The results indicate that the thin film has excellent o-rientation
exhibiting obvious columnar growth tendency. The coercive force of the thin film is greatly increased and the H/H ration is improved. The optimum magnetic property can be obtained with heating from 200C to 500C gradually and holding time for 10 min.
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